Olawumi, Teju TundeTeju TundeOlawumiLevrau, E.E.LevrauKrishtab, MikhailMikhailKrishtabDetavernier, C.C.DetavernierBartha, J.W.J.W.BarthaLazzarino, FredericFredericLazzarinoBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220152162-8769https://imec-publications.be/handle/20.500.12860/25702Modification of PECVD and SOG ultralow-k films by CO2 plasmaJournal articlehttp://jss.ecsdl.org/content/4/1/N3048.abstract