van Setten, EelcoEelcovan SettenMouraille, O.O.MourailleWittebrood, F.F.WittebroodDusa, MirceaMirceaDusavan Ingen-Schenau, KoenKoenvan Ingen-SchenauFinders, JoJoFindersFeenstra, KeesKeesFeenstraBekaert, JoostJoostBekaertLaenens, BartBartLaenensPhilipsen, VickyVickyPhilipsenErcken, MoniqueMoniqueErckenHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenberghe2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/1820122nm node imaging and beyond: a comparison of EUV and ArFi double patterningProceedings paper