Comparative Study on the Energy Distribution of Defects under HCD and NBTI in Short Channel p-FinFETs

Chang, HaoHaoChangZhou, LongdaLongdaZhouYang, HongHongYangJi, ZhigangZhigangJiLiu, QianqianQianqianLiuSimoen, EddyEddySimoenYin, HuaxiangHuaxiangYinWang, WenwuWenwuWang2022-07-072021-11-022022-07-0720211541-7026WOS:000672563100073https://imec-publications.be/handle/20.500.12860/37694Comparative Study on the Energy Distribution of Defects under HCD and NBTI in Short Channel p-FinFETsProceedings paper10.1109/IRPS46558.2021.9405162978-1-7281-6893-7WOS:000672563100073POSITIVE CHARGES