Experimentally Validated Thermal Modeling Prediction for BEOL and BSPDN Stacks

Chang, XinyueXinyueChangOprins, HermanHermanOprinsVermeersch, BjornBjornVermeerschCherman, VladimirVladimirChermanLofrano, MelinaMelinaLofranoPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokeiDe Wolf, IngridIngridDe Wolf2025-04-102024-12-072025-04-102024979-8-3503-7599-20569-5503WOS:001260983500080https://imec-publications.be/handle/20.500.12860/44934Experimentally Validated Thermal Modeling Prediction for BEOL and BSPDN StacksProceedings paper10.1109/ECTC51529.2024.00084979-8-3503-7598-5WOS:001260983500080INTERCONNECT