Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition

Deleu, JeroenJeroenDeleuBrijs, BertBertBrijsVandervorst, WilfriedWilfriedVandervorst2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3402Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and compositionOral presentation