Gate stack preparation with high-k materials in a cluster tool

De Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsConard, ThierryThierryConardNohira, HiroshiHiroshiNohiraRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxMaes, JosJosMaesTuominen, MarkoMarkoTuominenBajolet, PhilippePhilippeBajolet2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5190Gate stack preparation with high-k materials in a cluster toolProceedings paper