Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contacted pitch and 250μA/μm drain current

Smets, QuentinQuentinSmetsArutchelvan, GouthamGouthamArutchelvanJussot, JulienJulienJussotVerreck, DevinDevinVerreckAsselberghs, IngeIngeAsselberghsNalin Mehta, AnkitAnkitNalin MehtaGaur, AbhinavAbhinavGaurLin, DennisDennisLinEl Kazzi, SalimSalimEl KazziGroven, BenjaminBenjaminGrovenCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34035Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contacted pitch and 250μA/μm drain currentProceedings paper