Hellings, GeertGeertHellingsRosseel, ErikErikRosseelClarysse, TrudoTrudoClaryssePetersen, Dirch HjorthDirch HjorthPetersenHansen, OleOleHansenNielsen, Peter FolmetPeter FolmetNielsenSimoen, EddyEddySimoenEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerHoffmann, Thomas Y.Thomas Y.HoffmannDe Meyer, KristinKristinDe MeyerVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19059Systematic study of shallow junction formation on germanium substratesJournal article