Integration challenges of SPER junctions for the 45 nm technology node

Severi, SimoneSimoneSeveriRichard, LindsayLindsayRichardHenson, KirklenKirklenHensonPawlak, BartekBartekPawlakSatta, AlessandraAlessandraSattaDuffy, RayRayDuffySurdeanu, RaduRaduSurdeanu2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9584Integration challenges of SPER junctions for the 45 nm technology nodeOral presentation