Yu, DavidDavidYuLe, Quoc ToanQuoc ToanLeBraun, SimonSimonBraunKesters, ElsElsKestersShen, MaryMaryShenKlipp, AndreasAndreasKlippHolsteyns, FrankFrankHolsteyns2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24870Challenges in BEOL cleaning for the 10 nm node and beyondMeeting abstract