Vlekken, J.J.VlekkenCroes, KrisKrisCroesWu, Ting-DiTing-DiWuD'Olieslaeger, MarcMarcD'OlieslaegerKnuyt, G.G.KnuytVandervorst, WilfriedWilfriedVandervorstDe Schepper, LucLucDe Schepper2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4012Investigation of the formation of M-2(+)-molecular ions in sputtering processesJournal article