Sajjadian, FaeghehFaeghehSajjadianGalleni, LauraLauraGalleniDorney, KevinKevinDorneySingh, DhirendraDhirendraSinghHolzmeier, FabianFabianHolzmeiervan Setten, MichielMichielvan SettenDe Gendt, StefanStefanDe GendtConard, ThierryThierryConard2024-03-122023-08-122024-03-1220230734-2101WOS:001041157500001https://imec-publications.be/handle/20.500.12860/42327Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materialsJournal article10.1116/6.0002808WOS:001041157500001APPROXIMATION