Shirakawa, HajimeHajimeShirakawaSnow, j.j.SnowOtsuji, M.M.OtsujiYoshida, Y.Y.YoshidaTakahashi, H.H.TakahashiSebaai, FaridFaridSebaaiHolsteyns, FrankFrankHolsteynsSato, M.M.Sato2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29432Surface preparation and wet cleaning for germanium surfaceProceedings paper