Impact of oxide liner properties on TSV Cu pumping and TSV stress

De Messemaeker, JokeJokeDe MessemaekerVarela Pedreira, OlallaOlallaVarela PedreiraMoussa, AlainAlainMoussaNabiollahi, NabiNabiNabiollahiVanstreels, KrisKrisVanstreelsVan Huylenbroeck, StefaanStefaanVan HuylenbroeckPhilipsen, HaroldHaroldPhilipsenVerdonck, PatrickPatrickVerdonckVandevelde, BartBartVandeveldeDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyneCroes, KristofKristofCroes2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25143Impact of oxide liner properties on TSV Cu pumping and TSV stressProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112736