Zalieckas, JustasJustasZalieckasPobedinskas, PauliusPauliusPobedinskasGreve, Martin MollerMartin MollerGreveEikehaug, KristofferKristofferEikehaugHaenen, KenKenHaenenHolst, BodilBodilHolst2022-02-242022-02-2420210925-9635WOS:000663581700005https://imec-publications.be/handle/20.500.12860/39106Large area microwave plasma CVD of diamond using composite right/left-handed materialsJournal article10.1016/j.diamond.2021.108394WOS:000663581700005LOW-TEMPERATURE DEPOSITIONSURFACE-WAVE PLASMATHIN-FILMSGROWTHEXCITATIONGUIDESIMULATION