Fin pitch impact on biaxial/uniaxial strain engineering of triple-gate devices

Rodrigues, M.M.RodriguesSonnenberg, V.V.SonnenbergMartino, J.A.J.A.MartinoCollaert, NadineNadineCollaertSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19694Fin pitch impact on biaxial/uniaxial strain engineering of triple-gate devicesProceedings paper