Hikavyy, AndriyAndriyHikavyyPorret, ClémentClémentPorretRosseel, ErikErikRosseelVohra, AnuragAnuragVohraLoo, RogerRogerLoo2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30897Application of group IV epitaxy in the advanced CMOS fabricationMeeting abstract