Chen, JiaheJiaheChenCornagliotti, EmanueleEmanueleCornagliottiLoozen, XavierXavierLoozenSimoen, EddyEddySimoenVanhellemont, J.J.VanhellemontLauwaert, J.J.LauwaertVrielinck, H.H.VrielinckPoortmans, JefJefPoortmans2021-10-192021-10-1920110021-8979https://imec-publications.be/handle/20.500.12860/18659Impact of firing on surface passivation of p-Si by SiO2/Al and SiO2/SiNx/Al stacksJournal article