Modlinski, RobertRobertModlinskiWitvrouw, AnnAnnWitvrouwRatchev, PetarPetarRatchevJourdain, AnneAnneJourdainSimons, VeerleVeerleSimonsTilmans, HarrieHarrieTilmansden Toonder, Jaap M.J.Jaap M.J.den ToonderPuers, BobBobPuersDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9308Creep as a reliability problem in MEMSJournal article