Study on La2O3 wet clean by pH controlled functional water

Ogawa, YuichiYuichiOgawaHideaki, IinoIinoHideakiFukui, TakeoTakeoFukuiOniki, YusukeYusukeOnikiAkanishi, YuyaYuyaAkanishiAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33687Study on La2O3 wet clean by pH controlled functional waterMeeting abstracthttp://ma.ecsdl.org/content/MA2019-02/23/1094.abstract