van Dorp, DennisDennisvan DorpCuypers, DanielDanielCuypersArnauts, SophiaSophiaArnautsMoussa, AlainAlainMoussaRodriguez, LeonardLeonardRodriguezDe Gendt, StefanStefanDe Gendt2021-10-212021-10-2120132162-8769https://imec-publications.be/handle/20.500.12860/23248Wet chemical etching of InP for cleaning applications: II. Oxide removalJournal articlehttp://jss.ecsdl.org/content/2/4/P190.abstract