Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology

Maes, DavidDavidMaesEveraert, Jean-LucJean-LucEveraertGoux, LudovicLudovicGouxLisoni, JuditJuditLisoniParaschiv, VasileVasileParaschivSchwitters, M.M.SchwittersHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersArtoni, C.C.ArtoniCaputa, ConcettaConcettaCaputaCasella, P.P.CasellaCorallo, G.G.CoralloRusso, G.G.RussoZambrano, R.R.ZambranoMonchoix, H.H.MonchoixVan Autryve, LucLucVan Autryve2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9248Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technologyJournal article