Ternary silicide formation from Ni-Pt, Ni-Pd and Pt-Pd alloys on Si(100): Nucleation and solid solubility of the monosilicides

Schrauwen, A.A.SchrauwenDemeulemeester, J.J.DemeulemeesterDeduytsche, D.D.DeduytscheDevulder, WouterWouterDevulderDetavernier, C.C.DetavernierComrie, C.M.C.M.ComrieTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantomme2021-10-242021-10-2420171359-6454https://imec-publications.be/handle/20.500.12860/29394Ternary silicide formation from Ni-Pt, Ni-Pd and Pt-Pd alloys on Si(100): Nucleation and solid solubility of the monosilicidesJournal articlehttp://www.sciencedirect.com/science/article/pii/S1359645417302136?via%3Dihub