Ronse, KurtKurtRonseWiaux, VincentVincentWiauxVerhaegen, StafStafVerhaegenVan Look, LieveLieveVan LookBekaert, JoostJoostBekaertLaidler, DavidDavidLaidlerCheng, ShauneeShauneeChengMaenhoudt, MireilleMireilleMaenhoudtVandenberghe, GeertGeertVandenbergheDusa, MirceaMirceaDusa2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16137Extreme scaling of optical lithography: overview of process integration issuesOral presentation