Implementing plasma texturing process with linear microwave plasma sources for ultra-thin multi-crytalline (<150um) solar cells

Chan, BTBTChanKunnen, EddyEddyKunnenUhlig, MatthiasMatthiasUhligXu, KaidongKaidongXuBoullart, WernerWernerBoullartRau, BerndBerndRauPoortmans, JefJefPoortmans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18651Implementing plasma texturing process with linear microwave plasma sources for ultra-thin multi-crytalline (<150um) solar cellsProceedings paper