Challenges probing next generation full array products with 60μm pitch and below

Vallauri, RaffaeleRaffaeleVallauriMarinissen, Erik JanErik JanMarinissenBroz, JerryJerryBroz2021-10-222021-10-222015-06https://imec-publications.be/handle/20.500.12860/26032Challenges probing next generation full array products with 60μm pitch and belowProceedings paperhttp://www.swtest.org/archive/