Compact silicon nitride arrayed waveguide gratings for very near-infrard wavelengths

Martens, DaanDaanMartensSubramanian, AnanthAnanthSubramanianPathak, ShibnathShibnathPathakVanslemsbrouck, MichaelMichaelVanslemsbrouckBienstman, PeterPeterBienstmanBogaerts, WimWimBogaertsBaets, RoelRoelBaets2021-10-222021-10-222015-011041-1135https://imec-publications.be/handle/20.500.12860/25621Compact silicon nitride arrayed waveguide gratings for very near-infrard wavelengthsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6928406