Witvrouw, AnnAnnWitvrouwHaspeslagh, LucLucHaspeslaghVarela Pedreira, OlallaOlallaVarela PedreiraDe Coster, JeroenJeroenDe CosterDe Wolf, IngridIngridDe WolfTilmans, HarrieHarrieTilmansBearda, TwanTwanBeardaSchlatmann, BartBartSchlatmannvan Bommel, MarkMarkvan Bommelde Nooijer, ChristineChristinede NooijerMagnee, P.H.C.P.H.C.MagneeLous, E.J.E.J.LousHagting, MarcoMarcoHagtingLauria, JohnJohnLauriaVanneer, RoelRoelVanneervan Drieenhuizen, BertBertvan Drieenhuizen2021-10-192021-10-1920101057-7157https://imec-publications.be/handle/20.500.12860/1836211-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applicationsJournal article