Shamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovClaes, MartineMartineClaesBoullart, WernerWernerBoullartParaschiv, VasileVasileParaschiv2021-10-182021-10-1820090098-6445https://imec-publications.be/handle/20.500.12860/16204Selective removal of high-k dielectricsJournal article