Chen, Y.T.Y.T.ChenNaessens, KrisKrisNaessensBaets, RoelRoelBaetsLiao, Y.S.Y.S.LiaoTseng, A.A.A.A.Tseng2021-10-162021-10-162005-12https://imec-publications.be/handle/20.500.12860/10212Ablation of transparent materials using excimer lasers for photonic applicationsJournal article