A novel degradation mechanism of AlGaN/GaN/Silicon heterostructures related to the generation of interface traps

Meneghini, M.M.MeneghiniBertin, M.M.BertinDal Santo, G.G.Dal SantoStocco, A.A.StoccoChini, A.A.ChiniMarcon, DenisDenisMarconMalinowski, PawelPawelMalinowskiMura, G.G.MuraMusu, E.E.MusuVanzi, M.M.VanziMeneghesso, G.G.MeneghessoZanoni, E.E.Zanoni2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21133A novel degradation mechanism of AlGaN/GaN/Silicon heterostructures related to the generation of interface trapsProceedings paper