Sutar, SurajitSurajitSutarChiappe, DanieleDanieleChiappeNuytten, ThomasThomasNuyttenConard, ThierryThierryConardAsselberghs, IngeIngeAsselberghsLin, DennisDennisLinRadu, IulianaIulianaRadu2021-10-272021-10-2720190003-6951https://imec-publications.be/handle/20.500.12860/34088Spin-on-diffussants for doping in transition metal dichalcogenide semiconductorsJournal articlehttps://doi.org/10.1063/1.5091553