Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devices

Lieten, RubenRubenLietenMaeda, TatsuroTatsuroMaedaSeo, Jin WonJin WonSeoJevasuwan, WipakornWipakornJevasuwanHattori, HiroyukiHiroyukiHattoriUchida, NoriyukiNoriyukiUchidaMiura, ShuShuMiuraTanaka, MasatoshiMasatoshiTanakaFleischmann, ClaudiaClaudiaFleischmannVantomme, AndreAndreVantommeJohnson, BrettBrettJohnsonLocquet, Jean-PierreJean-PierreLocquet2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24141Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devicesProceedings paperhttp://ecst.ecsdl.org/content/64/11/149.abstract