van Dorp, DennisDennisvan DorpMannarino, ManuelManuelMannarinoArnauts, SophiaSophiaArnautsBender, HugoHugoBenderMerckling, ClementClementMercklingMoussa, AlainAlainMoussaVandervorst, WilfriedWilfriedVandervorstSchulze, AndreasAndreasSchulze2021-10-242021-10-2420172073-4352https://imec-publications.be/handle/20.500.12860/29667Epitaxial defects in nanoscale InP Fin structures revealed by wet-chemical etchingJournal articlehttp://www.mdpi.com/2073-4352/7/4/98