Simoen, EddyEddySimoenBrugere, AntoineAntoineBrugereSatta, AlessandraAlessandraSattaFirrincieli, AndreaAndreaFirrincieliVan Daele, BennyBennyVan DaeleBrijs, BertBertBrijsRichard, OlivierOlivierRichardGeypen, JefJefGeypenMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-1820090021-8979https://imec-publications.be/handle/20.500.12860/16227Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germaniumJournal article