Pan, WanlingWanlingPanSoussan, PhilippePhilippeSoussanNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9387A surface micromachined tunable film bulk acoustic resonatorProceedings paper