Robertson, StewartStewartRobertsonWong, PatrickPatrickWongDe Bisschop, PeterPeterDe BisschopVandenbroeck, NadiaNadiaVandenbroeckWiaux, VincentVincentWiaux2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21399Interactions between imaging layers during LPLE double patterning lithographyProceedings paper