Singanamalla, RaghunathRaghunathSinganamallaYu, HongYuHongYuYuO'Sullivan, BarryBarryO'SullivanPetry, JasmineJasminePetryMercha, AbdelkarimAbdelkarimMerchaParaschiv, VasileVasileParaschivVolders, HennyHennyVoldersKubicek, StefanStefanKubicekDe Meyer, KristinKristinDe MeyerBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12916Performance enhancement of Poly-Si/TiN/SiON based pMOSFETs by addition of an AlO capping layerJournal article