Bargallo Gonzalez, MireiaMireiaBargallo GonzalezRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyFernandez Lanas, TatianaTatianaFernandez LanasEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenLoo, RogerRogerLooSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-1820100894-6507https://imec-publications.be/handle/20.500.12860/16705Stress analysis ad junction leakage of sub-melt laser annealed SiGe epitacial layersJournal article