Reliability in gate first and gate last Ultra-Thin-EOT gate stacks assessed with CV-eMSM BTI characterization

Bury, ErikErikBuryKaczer, BenBenKaczerToledano Luque, MariaMariaToledano LuqueArimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarssonVeloso, AnabelaAnabelaVelosoChew, Soon AikSoon AikChewTogo, MitsuhiroMitsuhiroTogoSchram, TomTomSchramGroeseneken, GuidoGuidoGroeseneken2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20407Reliability in gate first and gate last Ultra-Thin-EOT gate stacks assessed with CV-eMSM BTI characterizationMeeting abstract