Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior

Schmolke, R.R.SchmolkeBlietz, M.M.BlietzHölzl, R.R.HölzlMenzel, D.D.MenzelBender, HugoHugoBender2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6800Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behaviorProceedings paper