Malhouitre, StephaneStephaneMalhouitreVan Hoeymissen, JanJanVan HoeymissenCase, CarlyeCarlyeCaseGranger, PascalPascalGranger2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12543Etching of thermal SiO2 in supercritical CO2Proceedings paper