Optical bandgap of ultra-thin amorphous silicon films deposited on crystalline silicon by PECVD

Abdulraheem, YaserYaserAbdulraheemGordon, IvanIvanGordonBearda, TwanTwanBeardaMeddeb, HosnyHosnyMeddebPoortmans, JefJefPoortmans2021-10-222021-10-2220142158-3226https://imec-publications.be/handle/20.500.12860/23462Optical bandgap of ultra-thin amorphous silicon films deposited on crystalline silicon by PECVDJournal articlehttp://scitation.aip.org/content/aip/journal/adva/4/5/10.1063/1.4879807