Probing the effect of point defects on the leakage blocking capability of Al0.1Ga0.9N/Si structures using a monoenergetic positron beam

Uedono, AkiraAkiraUedonoZhao, MingMingZhaoSimoen, EddyEddySimoen2021-10-232021-10-232016-120021-8979https://imec-publications.be/handle/20.500.12860/27414Probing the effect of point defects on the leakage blocking capability of Al0.1Ga0.9N/Si structures using a monoenergetic positron beamJournal articlehttp://scitation.aip.org/content/aip/journal/jap/120/21/10.1063/1.4970984