Malainou, AntoniaAntoniaMalainouMajeed, BivraghBivraghMajeedSabuncuoglu Tezcan, DenizDenizSabuncuoglu Tezcan2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28900Cavity wafer bonding after deep silicon etchMeeting abstract