Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy

Hens, S.S.HensVan Landuyt, J.J.Van LanduytBender, HugoHugoBenderBoullaert, W.W.BoullaertVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4422Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopyOral presentation