Ruzyllo, JerzyJerzyRuzylloRöhr, ErikaErikaRöhrBaeyens, MartienMartienBaeyensBearda, TwanTwanBeardaMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2920Gas-phase surface proessing prior to 3.2nm gate oxidationOral presentation