Analysis of the ZTC-Point for Vertically Stacked Nanosheet pMOS Devices

Coelho, Carlos H. S.Carlos H. S.CoelhoMartino, Joao A.Joao A.MartinoSimoen, EddyEddySimoenVeloso, AnabelaAnabelaVelosoAgopian, Paula G. D.Paula G. D.Agopian2023-08-092023-06-202023-08-092021naWOS:000948082600023https://imec-publications.be/handle/20.500.12860/42065Analysis of the ZTC-Point for Vertically Stacked Nanosheet pMOS DevicesProceedings paper10.1109/LAEDC51812.2021.9437935978-1-6654-1510-1WOS:000948082600023ZERO-TEMPERATURE-COEFFICIENTDEGRADATIONMOBILITY