Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance

Figeys, BrunoBrunoFigeysNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25272Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toeleranceProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7051134