Epitaxy-free monocrystalline silicon thin films: identifying the mechanisms behind lifetime degradation upon multiple high-temperature annealings

Depauw, ValerieValerieDepauwSimoen, EddyEddySimoenGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-192021-10-1920110031-8965https://imec-publications.be/handle/20.500.12860/18831Epitaxy-free monocrystalline silicon thin films: identifying the mechanisms behind lifetime degradation upon multiple high-temperature annealingsJournal article